KLA Tencor Alpha-Step IQ Operating Manual
This i nstruction c overs s etup a nd u se o f t he K LA-‐Tencor A lpha-‐Step I Q ( ASIQ) p rofilometer.
SAFETY C AUTIONSThe A SIQ i s a r elatively r isk-‐free t ool f or o perator, w ith n o o bvious p ersonal s afety h azards. T hat s aid, t he
operator c an s till d amage t he i nstrument i n s everal w ays. D O N OT p lace, r emove, o r m ove s amples w hile t he
stylus t ip i s d own. T his m ay d amage t he s tylus t ip. A lso, a djust t he s tage p osition ( x,y) u sing t he c ontrol k nobs
and n ot y our h ands. Stage C ontrol LOCATION: Cleanroom, L-Bay T able o f C ontents 1. Safety C autions Pg. 1 2. Equipment 4. Operating G uide Pg. 3 Sample P latform F igure 1 : A SIQ C omponents EFFECTIVE: 02/23/15 User I nterface C omputer, U SB ( Under T able) CONTACT: srinehar@purdue.edu C amera Z oom C ontrol PAGE: 1 of 4 Table of ContentsNeed help?
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